Fault detection in semiconductor fabs combines data collection, monitoring, mathematical modeling, interdiction, and notification to increase tool productivity and eliminate scrap. Fault detection typically combine data feeds from multiple sources and analyze the data in real time. When a predefined condition is detected, a range of actions can be taken from simple notification to actively resolving the tool issue. Fault detection applications are applied across processes and even across tool types in fabs.

Leading semiconductor equipment manufacturers worldwide choose Adventa to address and exceed the complex requirements of fabwide fault detection deployments. We have helped customers implement complete fabwide deployment of  fault detection on virtually all types of semiconductor process equipment including etch, deposition, cleaning, lithography systems (track and steppers), CMP, RTP, and multi-chambered cluster tools.

Our resources are used by fabs worldwide to:

• perform requirements analyses and deployment plans for fault detection applications

• train and mentor equipment engineering staffs on the use of fault detection

• assist with deployment of fault detection software

• create fault detection models for specific tool types    

To learn about the features and benefits of our products for fault detection, select a product below: