In a production wafer fab, especially a fab with run-to-run process control, centralized recipe management is extremely important. RecipeWORKS is a recipe library management system that provides a central repository for all recipes used in the fab. RecipeWORKS provides complete revision control of recipes through a comprehensive sign-out and approval procedure using Engineering Change Notices (ECNs). At run-time, RecipeWORKS merges current setting values into the recipe body and downloads the recipe to the processing tool, eliminating the need to maintain multiple versions of a recipe for different setting values.

RecipeWORKS provides:

• Recipe storage in a central repository

• Revision and ECN (Engineering Change Notice) control

• Reusability of existing recipes

• Communication with an equipment server to upload and download recipes

• Runtime recipe modifications required by run-to-run control applications, like ProcessWORKS

For specific tool case studies, contact us.