ProcessWORKS is the industry's leading software for run-to-run advanced process control (APC). Using this self-contained application, our customers increase their profit and decrease costs every day. ProcessWORKS enables run-to-run supervisory process control that advances beyond traditional statistical process control and process monitoring, allowing you to define recipes in terms of desired wafer effects (such as thickness) rather than machine settings (such as time of deposition). Using the control strategy configured by the engineer, ProcessWORKS calculates settings, performs analysis of the feedback data, and adjusts the process model to keep the process on target.

ProcessWORKS has been deployed in all of the major process areas of semiconductor manufacturing. This framework-based APC solution can be quickly fanned out across your factory, providing a significant and immediate return on your investment.

ProcessWORKS provides many measurable benefits on the tool and across the fab:

On the tool

• Reduced setup and inspection time and costs

• Reduced misprocessing

• Reduced process variability

• Fewer scrapped and non-production wafers

• Reduced engineering sustaining costs

• Improved process capability and increased Cpk

• Improved machine capacity and throughput

Across the fab

• Increased factory capacity and yields

• Reduced costs due to less consumables, reduced process engineering and manufacturing cycle time, and fewer fab capital equipment expenses

For specific tool case studies and technical papers, contact us.