GAMMA2 connects applications to tools, enabling fault detection and run-to-run process control. With or without a SECS communication port, GAMMA2 communicates with semiconductor process tools to allow you to access equipment information. The GAMMA2 compact hardware platform uses an X86 processor, Linux OS, hard drive, and a range of I/O ports. With serial, ethernet, analog, and digital capabilities, GAMMA2 supports a wide range of equipment connectivity requirements ranging from protocol conversion to complex support for advanced process control.

 

This complete data acquisition system: Collects data directly from equipment sensors Routes equipment data to factory host or other applications  Enables SECS-I to HSMS communication Adds applications to factory control architecture without changing host software
For specific tool case studies, contact us. Adventa Control Technologies, Inc. (ACT) stands behind GAMMA2 with a limited hardware warranty and convenient return authorization form.