ARTIST (Adventa Real-Time Interdiction Software Tool) enables development of human-readable models based on engineering experience. These models can be applied across processes and even across tool types. By analyzing both real-time and historical data, ARTIST frees users from manual monitoring of equipment and processes. When a model detects a condition, the system can respond using actions ranging from simple notification to taking action on the tool.

The robust ARTIST system architecture is flexible enough to use in any semiconductor manufacturing fab, on any process, or on any production tool to prevent scrap and improve tool utilization.   

The ARTIST client tool set is summarized below: 

Model Editor builds and tests models graphically from components including

• Boolean functions
• Strings
• Matrices

• Timers

Action Customizer allows you to configure and test actions including

• Logging
• Messaging
• Alarms
• Interdiction

Real-Time Viewer displays data in real time to

• View data anywhere
• Plot selected equipment parameters
• Display one or more process chambers
• Highlight emerging conditions through alarm panels

Historical Viewer allows you to analyze historical data using 

• Statistical functions
• Queries by date or context (lot, wafer, device)
• Alarms and events

ACTReports, the web-based reporting tool delivered with ARTIST, allows you to configure, schedule, and view reports over the network through a web browser. ACTReports consists of a platform-independent report server, one or more configurable data sources, and a set of reports either fully customized or based on sample reports provided with the product. Output formats for reports include PDF, HTML, and Excel. Reports can include complex grouping and formatting, graphic images, and dynamically created charts. These reports can be organized in folders, saved with parameter values, and executed interactively or scheduled for execution to view at a later time.

For specific tool case studies and technical papers, contact us.