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January 2005: Adventa Announces Development of
Interface A product
Since 1993, Adventa Control Technologies
has licensed ControlWORKS machine and process control software to
semiconductor equipment manufacturers worldwide. In 2004, Adventa released
GAMMA2, a hardware platform for real-time collection of tool and process
data. In early 2005, Adventa plans to release a new product: Interface A,
a suite of standards defining the interface between semiconductor process
tools and the factory network. Interface A will support data
collection for multiple clients, each with its own multiple data collection
plans (DCPs).
“In addition to software product
development, system integration is a key business unit within Adventa,” said
an Adventa representative. “Interface A, and
its ability to put equipment and process data on the factory network in XML
format, will enable much more standardized collection and use of data, as
well as streamline the equipment integration effort in automated fabs."
Interface A
will be available in three forms:
-
an addition
to Adventa's ControlWORKS machine control software product
-
a software product that will run on
GAMMA2 hardware
-
a standalone software product that may
be installed on a customer’s client and dedicated to a production tool
Interface A
embodies four relatively new standards:
-
E120-Common
equipment Model
-
E125-Equipment Self Description
-
E132-Equipment Client Authentication
and Authorization
-
E134-Data Collection Management
In 200 and 300mm fabs, realtime data
collection is the foundation for equipment tracking, equipment monitoring,
fault detection, and run-to-run process control. Adventa looks forward to
delivering
Interface A capability to
customers worldwide early next year. |