2002 Dec 20 - GAMMA, the Most Widely Deployed Tool for Equipment Connectivity

Plano, TX: December 20

GAMMA, the Most Widely Deployed Equipment Connectivity Tool in the Semiconductor Industry

Already installed on more than 4,000 semiconductor process tools worldwide, GAMMA provides the communications interface for production tools and the realtime data collection capability required to support equipment monitoring, fault detection, and run-to-run process control solutions in production wafer fabs.

“GAMMA is the industry’s low cost solution for equipment connectivity,” said Adventa's representative. “It’s widely used on 150, 200 and 300mm tools.” GAMMA deals with the differences between the various OEM implementations of the SEMI communication standard and provides the necessary realtime data collection capability to support fab-level solutions to improve fab and equipment productivity

GAMMA provides features and functionality not available from other vendors in the semiconductor industry. With it’s small size, realtime operating system, tool connecting ability, and many sensors using GAMMA’s Analog, Digital, Sensor Bus and Ethernet interface capability, GAMMA far exceeds any equipment connectivity tool on the market.
In production fabs, the GAMMA is positioned between the tool and the factory network. With a small size of 5” x 9” x 2”, GAMMA modules are typically installed within the enclosure of a production tool. Using GAMMA’s ability to collect data in realtime and share this data with factory level applications, GAMMA becomes the fab’s enabler for realtime equipment fault detection, run-to-run process control, and equipment monitoring.